Chip-on-Wafer Structures and Methods for Forming the Same

ABSTRACT

A package component includes a substrate, wherein the substrate has a front surface and a back surface over the front surface. A through-via penetrates through the substrate. A conductive feature is disposed over the back surface of the substrate and electrically coupled to the through-via. A first dielectric pattern forms a ring covering edge portions of the conductive feature. An Under-Bump-Metallurgy (UBM) is disposed over and in contact with a center portion of the conductive feature. A polymer contacts a sidewall of the substrate. A second dielectric pattern is disposed over and aligned to the polymer. The first and the second dielectric patterns are formed of a same dielectric material, and are disposed at substantially a same level.

PRIORITY CLAIM AND CROSS-REFERENCE

This application is a continuation of U.S. application Ser. No.14/157,666 entitled “Chip-on-Wafer Structures and Methods for Formingthe Same,” filed Jan. 17, 2014 which application is a divisional of U.S.patent application Ser. No. 13/397,204, entitled “Chip-on-WaferStructures and Methods for Forming the Same,” filed on Feb. 15, 2012,which application claims the benefit of the following provisionallyfiled U.S. Patent Application Ser. No. 61/565,346, filed Nov. 30, 2011,and entitled “Chip-on-Wafer Structures and Methods for Forming theSame,” which applications are hereby incorporated herein by reference.

BACKGROUND

In three-dimensional integrated circuit (3DIC) formation processes,device dies may be bonded to a wafer. Typically, after the bonding ofthe dies onto the wafer, a molding compound is applied to encapsulatethe device dies and the wafer. Solder bumps are formed on the wafer toelectrically couple to the devices in the wafer. The electricalconnection to the devices in the device dies and the devices in thewafer is achieved through Through-Silicon Vias (TSVs).

After the molding compound is applied, a die saw is performed to saw thewafer and the device dies into packages, wherein each of the packagesmay include one of the device dies and one of the chips in the wafer.The die saw is typically performed using a blade, which cuts through thescribe lines in the wafer. Since the wafer may include low-k dielectricmaterials, the mechanical stress applied by the blade may cause cracks.The cracks in the low-k dielectric materials may propagate to the chipsin the wafer, resulting in the yield loss.

BRIEF DESCRIPTION OF THE DRAWINGS

For a more complete understanding of the embodiments, and the advantagesthereof, reference is now made to the following descriptions taken inconjunction with the accompanying drawings, in which:

FIGS. 1 through 11B are cross-sectional views of intermediate stages inthe manufacturing of a package in accordance with some exemplaryembodiments; and

FIG. 12 illustrates a top view of a package formed using the process inFIGS. 1 through 11B.

DETAILED DESCRIPTION OF ILLUSTRATIVE EMBODIMENTS

The making and using of the embodiments of the disclosure are discussedin detail below. It should be appreciated, however, that the embodimentsprovide many applicable inventive concepts that can be embodied in awide variety of specific contexts. The specific embodiments discussedare illustrative, and do not limit the scope of the disclosure.

Chip-on-Wafer (CoW) packages and methods for forming the same areprovided in accordance with exemplary embodiments. The intermediatestages of forming the CoW packages in accordance with embodiments areillustrated. The variations of the embodiments are discussed. Throughoutthe various views and illustrative embodiments, like reference numbersare used to designate like elements.

FIGS. 1 through 11B are cross-sectional views of intermediate stages inthe packaging of integrated circuits in accordance with some exemplaryembodiments. FIG. 1 illustrates a cross-sectional view of packagecomponent 20, which may be a device wafer, an interposer wafer, or thelike. Package component 20 includes substrate 22. In some embodiments,substrate 22 is a semiconductor substrate such as a crystalline siliconsubstrate. Alternatively, substrate 22 comprises other semiconductormaterials such as silicon germanium, silicon carbon, or the like. Inalternative embodiments, substrate 22 is a dielectric substrate. Packagecomponent 20 may be a device wafer, which includes active devices suchas transistors (not shown) formed at surface 22A of semiconductorsubstrate 22. Throughout the description, surfaces 22A and 22B arereferred to as a front surface and a back surface, respectively, ofsubstrate 22. When package component 20 is a device wafer, it may alsoinclude passive devices (not shown) such as resistors and/or capacitors.In alternative embodiments, package component 20 is an interposer waferthat does not have active devices therein. In these embodiments, packagecomponent 20 may, or may not, include passive devices formed therein.

Through-Substrate Vias (TSVs) 24 may be formed to extend from topsurface 22A of substrate 22 into substrate 22. TSVs 24 are alsosometimes referred as through-silicon vias when substrate 22 is asilicon substrate. Package component 20 includes a plurality of packagecomponents 40, which may be identical to each other. A plurality ofscribe lines 42 are located between neighboring package components 40.Package components 40 may be device dies (also known as chips),interposer dies/chips, or the like.

Interconnect structure 28 is formed over substrate 22, and is used toelectrically connect to the integrated circuit devices in packagecomponent 20 and/or TSVs 24. Interconnect structure 28 may include aplurality of dielectric layers 30. Metal lines 32 are formed indielectric layers 30. Vias 34 are formed between, and interconnecting,the overlying and underlying metal lines 32. Metal lines 32 and vias 34are sometimes referred to as Redistribution Lines (RDLs) 32/34. In someembodiments, dielectric layers 30 comprise silicon oxide, siliconnitride, silicon carbide, silicon oxynitride, or combinations thereof.Alternatively, dielectric layers 30 may include one or more low-kdielectric layer having low k values. The k values of the low-kdielectric materials in dielectric layers 30 may be lower than about3.0, or lower than about 2.5, for example.

Connectors 38 are formed at the top surface of package component 20. Insome embodiments, connectors 38 include metal pillars, wherein soldercaps may be, or may not be, formed on the top surfaces of the metalpillars. In alternative embodiments, connectors 38 comprise solderregions. In yet other embodiments, connectors 38 may be composite bumpsincluding copper posts, nickel layers, solder caps, and/or the like.

Referring to FIG. 2, package components 44 are bonded to packagecomponent 20, for example, through flip-chip bonding. Connectors 38accordingly electrically couple the circuits in package components 44 toRDLs 32/34 and TSVs 24 in package component 20. Package components 44may be device dies comprising logic circuits, memory circuits, or thelike. Accordingly, package components 44 are alternatively referred toas dies 44 throughout the description. Alternatively, package components44 may include packages including dies bonded to the respectiveinterposers, package substrates, and/or the like. On each of chips 40,there may be two or more dies 44 bonded thereon.

Next, polymer 45 is dispensed into the space (gaps) between dies 44 andpackage component 20. Polymer 45 may be an underfill, and hence isreferred to as underfill 45 hereinafter, although it may also compriseother polymers such as epoxy. Underfill 45 may also be a moldingunderfill.

Referring to FIG. 3, a grooving step is performed on package component20 to form trenches 46. Trenches 46 are located in scribe lines 42. Thebottoms of trenches 46 may be substantially level with, or below, thebottom ends of TSVs 24. Width W1 of trenches 46 may be between about 10μm and about 100 μm, for example. Width W1 of trenches 46 may also besmaller than or substantially equal to width W2 of scribe lines 42.

Next, as shown in FIG. 4, polymer 56 is molded on dies 44 and packagecomponent 20, for example, using compress molding. In some embodiments,polymer 56 comprises a molding compound, an epoxy, or the like. Polymer56 may comprise first portions filling into trenches 46 and extendinginto substrate 22, second portions filling the gaps between neighboringdies 44, and third portions over dies 44. Polymer 56 is then cured.Referring to FIG. 5, in some embodiments, after the curing of polymer56, a planarization step, such as a grinding step, is performed to levelthe top surface of polymer 56. The portions of polymer 56 over dies 44are removed. As a result, the top surfaces of some or all dies 44 areexposed. In alternative embodiments, no planarization step is performed.

FIGS. 6 through 10 illustrate the formation of the backside structure ofpackage component 20. The package structure shown in FIG. 5 is firstflipped upside down, and semiconductor substrate 22 faces upwardly.Carrier 58 is then attached to the bottom of the package structure, forexample, through adhesive 60. In some exemplary embodiments, carrier 58is a glass wafer. Adhesive 60 may be an Ultra-Violet (UV) glue in someexemplary embodiments.

Referring to FIGS. 7A and 7B, a backside grinding is performed on thebackside of semiconductor substrate 22 to thin semiconductor substrate22, until TSVs 24 are exposed. Insulation layer (or insulation layers)62 is then formed on the backside of semiconductor substrate 22, whereinTSVs 24 extend through insulation layer 62. Insulation layer 62 isformed after thinning semiconductor substrate 22, and a ChemicalMechanical Polish (CMP) process is performed to expose TSVs 24.Insulation layer 62 also acts as an isolation layer to isolatesemiconductor substrate 22. The materials of insulation layer 62 mayinclude silicon oxide, silicon nitride, or the like. The formationprocess for forming insulation layer 62 may include low-temperaturedeposition processes. In some embodiments, as shown in FIG. 7A, afterthe formation of insulation layer 62, polymer portions 56A are exposedthrough insulation layer 62. Alternatively, as shown in FIG. 7B,insulation layer 62 covers polymer portions 56A.

Refer to FIG. 8, conductive features 64 are formed over insulation layer62 and connected to TSVs 24. Conductive features 64 includeRedistribution Lines (RDLs) and conductive pads. In some embodiments,conductive features 64 comprise aluminum, copper, and/or the like. Inaccordance with some embodiments, the formation of conductive features64 includes forming a blanket layer, and patterning the blanket layer.

Next, as shown in FIG. 9, dielectric patterns 66A and 66B are formed.Dielectric patterns 66A and 66B may include a polymer such as epoxy,polyimide, benzocyclobutene (BCB), polybenzoxazole (PBO), and the like.Dielectric patterns 66A and 66B may also include photo-sensitivematerials (such as PBO or polyimide). Accordingly, the formation ofdielectric patterns 66A and 66B may include applying a blanketphoto-sensitive material, and exposing and developing thephoto-sensitive material. The materials of dielectric patterns 66A and66B may be relatively soft for absorbing stress. Alternatively, otherdielectric materials such as oxides, nitrides, combinations thereof, andmulti-layers thereof, may also be used for forming dielectric patterns66A and 66B. The respective formation process includes low-temperaturedeposition process(es), so that adhesive 58 is not damaged.

Dielectric patterns 66A may have ring shapes in the top view of thestructure shown in FIG. 9. Dielectric patterns 66B include portions thatare over and aligned to polymer portions 56A. Furthermore, dielectricpatterns 66B may have width W3 greater than width W1 of polymer portions56A, and may extend beyond the respective edges of polymer portions 56A.Accordingly, dielectric patterns 66B may cover entireties of polymerportions 56A. In the embodiments wherein polymer portions 56A penetratethrough insulation layer 62, dielectric patterns 66B are in contact withpolymer portions 56A. In alternative embodiments wherein polymerportions 56A are covered by insulation layer 62 (FIG. 7B), dielectricpatterns 66B are spaced apart from polymer portions 56A by insulationlayer 62. An exemplary top view of dielectric patterns 66A and 66B areillustrated in FIG. 12.

FIG. 10 illustrates the formation of connectors 68, which areelectrically coupled to TSVs 24 through the exposed portions ofconductive features 64. In some embodiments, connectors 68 are solderballs. In other embodiments, connectors 68 may comprise metal pads,metal bumps, solder caps, or the like. The exemplary formation processmay include blanket forming a blanket under-bump-metallurgy (UBM) layer(not shown) using Physical Vapor Deposition (PVD), forming a mask (notshown), wherein the portion of the UBM layer directly over the exposedportions of conductive features 64 are exposed through the mask, whilesome other portions of the UBM are covered. Connectors 68 are thenplated into the openings in the mask. The mask is then removed, and aflash etch is performed to remove the exposed portions of the UBM layernot covered by connectors 68. The remaining portions of the UBM layerare referred to as UBMs 67. In the embodiments wherein connectors 68comprise solder, a reflow may be performed after the plating. Connectors68 may be used to bond to an additional electrical component (notshown), which may be a package substrate, a printed circuit board (PCB),or the like.

A die sawing is then performed to saw apart packages 70 from the packagestructure shown in FIG. 10. The sawing is performed along scribe lines42. The kerf lines 69 may be in the middle of polymer portions 56A (FIG.10). The resulting packages 70 are shown in FIGS. 11A and 11B. Each ofpackages 70 includes one of dies 40 and one or more of dies 44. Afterthe sawing, as shown in FIGS. 11A and 11B, some polymer portions 56Aremain on the sidewalls of substrate 22 and the sidewalls of dielectriclayers 30. Dielectric patterns 66B also have remaining portions over andaligned to polymer portions 56A, wherein the outer edges of dielectricpatterns 66B are aligned to the corresponding outer edges of polymerportions 56A. In FIG. 11A, dielectric patterns 66B contact the topsurfaces of polymer portions 56A. In FIG. 11B, dielectric patterns 66Bare spaced from polymer portions 56A by insulation layer 62.

FIG. 12 illustrates a top view of package 70. Dielectric pattern 66Bforms a ring that extends to the edges of package 70. The edges ofdielectric pattern 66B are aligned to the edges of polymer portion 56A,which also forms a ring encircling and contacting chip 40 (please referto FIG. 1). Dielectric pattern 66B, in addition to covering the entiretyof polymer portion 56A, may also extend slightly beyond polymer portion56A in the direction toward the center of package 70. Dielectricpatterns 66A may form a plurality of rings that is separated from eachother, and separated from dielectric pattern 66B. Each of dielectricpatterns 66A may form a ring covering edge portions of the respectiveunderlying conductive features 64.

In the embodiments, dielectric pattern 66B (FIG. 10) covers polymerportions 56A. Accordingly, in the packaging process, for example, in thedeposition process for forming UBM 67 as in FIG. 10, dielectric patterns66B prevents the out-gassing from polymer portion 56A. The undesirablere-deposition during the formation of UBMs 67 is thus reduced.

In accordance with embodiments, a package component includes asubstrate, wherein the substrate has a front surface and a back surfaceover the front surface. A through-via penetrates through the substrate.A conductive feature is disposed over the back surface of the substrateand electrically coupled to the through-via. A first dielectric patternforms a ring covering edge portions of the conductive feature. AnUnder-Bump-Metallurgy (UBM) is disposed over and in contact with acenter portion of the conductive feature. A polymer contacts a sidewallof the substrate. A second dielectric pattern is disposed over andaligned to the polymer. The first and the second dielectric patterns areformed of a same dielectric material, and are disposed at substantiallya same level.

In accordance with other embodiments, a wafer includes a plurality ofchips including a plurality of through-substrate vias penetratingthrough a semiconductor substrate of the wafer, and a plurality ofscribe lines separating the plurality of chips from each other. Aplurality of dies is underlying and bonded to a front side of the wafer.A first polymer region includes first portions in the plurality ofscribe lines, wherein the first portions penetrate through the wafer andcontact sidewalls of the semiconductor substrate. The first polymerregion further includes second portions at a same level as, andencircling, the plurality of dies. A plurality of conductive features isdisposed on a back side of the semiconductor substrate and electricallycoupled to the plurality of through-substrate vias. A second polymerlayer includes first portions covering edge portions of the pluralityconductive features, and second portions over and aligned to the firstportions of the first polymer region.

In accordance with yet other embodiments, a method includes formingtrenches in scribe lines of a wafer, wherein the trenches extend from afront surface of the wafer into a substrate of the wafer. A firstpolymer is filled into the trenches. The substrate is thinned from thebackside, wherein the first polymer and through-vias in the substrateare exposed after the step of thinning Conductive features are formed onthe backside of the wafer and electrically coupled to the through-vias.A second polymer layer is formed on the backside of the wafer andcovering the conductive features. The second polymer layer is thenpatterned. The remaining portions of the patterned second polymer layerinclude first portions covering edge portions of the conductivefeatures, and second portions aligned to portions of the first polymerin the trenches.

Although the embodiments and their advantages have been described indetail, it should be understood that various changes, substitutions andalterations can be made herein without departing from the spirit andscope of the embodiments as defined by the appended claims. Moreover,the scope of the present application is not intended to be limited tothe particular embodiments of the process, machine, manufacture, andcomposition of matter, means, methods and steps described in thespecification. As one of ordinary skill in the art will readilyappreciate from the disclosure, processes, machines, manufacture,compositions of matter, means, methods, or steps, presently existing orlater to be developed, that perform substantially the same function orachieve substantially the same result as the corresponding embodimentsdescribed herein may be utilized according to the disclosure.Accordingly, the appended claims are intended to include within theirscope such processes, machines, manufacture, compositions of matter,means, methods, or steps. In addition, each claim constitutes a separateembodiment, and the combination of various claims and embodiments arewithin the scope of the disclosure.

What is claimed is:
 1. A device comprising: a package componentcomprising a substrate; a through-via penetrating through the substrate;a conductive feature over a first surface of the package component andelectrically coupled to the through-via; a polymer comprising a firstportion contacting a sidewall of the substrate, and a second portionoverlapped by the package component; and a first dielectric patterncomprising: a first portion over and aligned to the polymer; and asecond portion over the substrate and vertically misaligned with thepolymer.
 2. The device of claim 1, wherein the first dielectric patterncomprises an additional polymer.
 3. The device of claim 1, wherein thefirst dielectric pattern comprises a photo-sensitive material.
 4. Thedevice of claim 1 further comprising a device die bonded to the packagecomponent, with the device die and the first dielectric pattern being onopposite sides of the package component.
 5. The device of claim 1,wherein the polymer forms a first ring encircling the substrate andcontacting sidewalls of the substrate, wherein the first dielectricpattern comprises a second ring over and aligned to the first ring, andwherein the first ring and the second ring have outer edges aligned toeach other.
 6. The device of claim 1 further comprising: a seconddielectric pattern forming a ring covering edge portions of theconductive feature, wherein the first dielectric pattern and the seconddielectric pattern are formed of a same dielectric material, coplanarwith each other, and disconnected from each other; and aUnder-Bump-Metallurgy (UBM) over and in contact with a center portion ofthe conductive feature.
 7. The device of claim 1, wherein the firstdielectric pattern is in physical contact with the polymer.
 8. A devicecomprising: a first device die comprising: a semiconductor substrate; athrough-via penetrating through the substrate; and an interconnectstructure over the semiconductor substrate; a second device dieunderlying and bonded to the first device die; a molding compoundmolding the first device die and the second device die therein, whereinthe molding compound encircles the first device die and the seconddevice die, and comprises: a top surface coplanar with a top surface ofthe interconnect structure; and a bottom surface coplanar with a bottomsurface of the second device die; and a polymer layer over theinterconnect structure, with bottom surfaces of the polymer layer incontact with top surfaces of the molding compound and the interconnectstructure.
 9. The device of claim 8, wherein the polymer layer comprisesa plurality of discrete portions and a ring portion encircling theplurality of discrete portions, and wherein the plurality of discreteportions and the ring portion are physically separated from each other.10. The device of claim 9, wherein the ring portion has outer edgesaligned to edges of the molding compound.
 11. The device of claim 9further comprising: a plurality of Under-Bump-Metallurgies (UBMs)extending into the discrete portions; and a plurality of solder regionsover and contacting the plurality of UBMs.
 12. The device of claim 8,wherein the polymer layer is formed of a photo-sensitive material. 13.The device of claim 8, wherein the molding compound comprises anadditional portion overlapped by the first device die.
 14. A devicecomprising: a package component comprising a substrate, wherein thesubstrate comprises a front surface, and a back surface over the frontsurface; a through-via penetrating through the substrate; a dieunderlying and bonded to a front side of the package component; apolymer encircling, and in physical contact with, sidewalls of thesubstrate and sidewalls of the die; and an insulation layer over thesubstrate, wherein the insulation layer comprises a bottom surfacecontacting the back surface of the substrate, and a top surfacesubstantially coplanar with a top surface of the polymer, and whereinthe through-via penetrates through the insulation layer.
 15. The deviceof claim 14, wherein sidewalls of the insulation layer are in physicalcontact with sidewalls of the polymer.
 16. The device of claim 14,wherein the polymer comprises an outer sidewall forming a ring, whereinthe outer sidewall comprises a first portion level with the substrate,and a second portion level with the die, and the first portion and thesecond portion of the outer sidewall are continuous and verticallyaligned with each other.
 17. The device of claim 14 further comprising:a conductive feature over the back surface of the substrate andelectrically coupled to the through-via; a first dielectric patternforming a ring covering edge portions of the conductive feature; aUnder-Bump-Metallurgy (UBM) over and in contact with a center portion ofthe conductive feature; and a second dielectric pattern over and alignedto the polymer, wherein the first dielectric pattern and the seconddielectric pattern are separated from each other, and wherein the firstand the second dielectric patterns are formed of a same dielectricmaterial.
 18. The device of claim 17, wherein the first and the seconddielectric patterns comprise a polymer.
 19. The device of claim 17,wherein the first and the second dielectric patterns comprise a photosensitive material.
 20. The device of claim 17, wherein the seconddielectric pattern forms a ring, with an outer edge of the ring alignedwith respective outer edges of the polymer.